Thermal Analysis and Characterization of a High Q Film Bulk Acoustic Resonator (FBAR) as Biosensers in Liquids


This paper presents the thermal analysis and characterization of a zinc oxide (ZnO) based film bulk acoustic resonator (FBAR) having a high quality factor (Q) in liquid environments for biosensing applications. Q of up to 120, an improvement of at least 8× greater than state-of-the-art devices in liquids, are achieved by integrating microfluidic channels… (More)


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