Theoretical modeling and equivalent electric circuit of a bimorph piezoelectric micromachined ultrasonic transducer

@article{Sammoura2012TheoreticalMA,
  title={Theoretical modeling and equivalent electric circuit of a bimorph piezoelectric micromachined ultrasonic transducer},
  author={Firas N. Sammoura and Sang-Gook Kim},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2012},
  volume={59}
}
An electric circuit model for a circular bimorph piezoelectric micromachined ultrasonic transducer (PMUT) was developed for the first time. The model was made up of an electric mesh, which was coupled to a mechanical mesh via a transformer element. The bimorph PMUT consisted of two piezoelectric layers of the same material, having equal thicknesses, and sandwiched between three thin electrodes. The piezoelectric layers, having the same poling axis, were biased with electric potentials of the… CONTINUE READING
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