Theoretical and experimental study of nanopore drilling by a focused electron beam in transmission electron microscopy.


Sub-10 nm nanopores drilled by a focused electron beam in a transmission electron microscope are widely used in solid-state nanopore devices for DNA translocation. However, there still remains much controversy surrounding the drilling mechanism. In order to explain the drilling of nanopores by electrons, we undertook a theoretical consideration of the… (More)
DOI: 10.1088/0957-4484/22/27/275303


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