Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology

@article{Xu2016TheoreticalAE,
  title={Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology},
  author={Wei Xu and Kui Yan Song and Shenhui Ma and Bo Gao and Yi Chiu and Yi-Kuen Lee},
  journal={Journal of Microelectromechanical Systems},
  year={2016},
  volume={25},
  pages={954-962}
}
A general 1-D model was presented to predict the characteristics of CMOS thermoresistive micro calorimetric flow (TMCF) sensor with two types of packaging, i.e., open-space type and channel type, for both gases and liquids. The 1-D model was first validated by a numerical computational fluid dynamics (CFD) model and was subsequently normalized for different fluids flow. Notably, the model proposed by Nguyen and Dötzel is a special case of our 1-D model. The normalized output of TMCF sensor is… CONTINUE READING

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