• Engineering
  • Published 2000

The semiconductor processing platform structure having an isolation capabilities of the processing module

@inproceedings{2000TheSP,
  title={The semiconductor processing platform structure having an isolation capabilities of the processing module},
  author={ブライト・ニコラス・ジェイ. and ムアリング・ベンジャミン・ダブリュ.},
  year={2000}
}
(57) Abstract: contained in a vacuum body provided respectively between the plurality of adjacent processing modules to the transport module, relative to the double-sided slot valves, providing an interlock control system. A 1 provides a pair of valves independently for each valve body slots, so that one body slot is opened and closed separately independently of each other. By an independent valve, while maintaining a conveying module in a vacuum, it is possible to vent open for servicing the… CONTINUE READING