The resonant body transistor.

  title={The resonant body transistor.},
  author={Dana Weinstein and Sunil Ashok Bhave},
  journal={Nano letters},
  volume={10 4},
This paper introduces the resonant body transistor (RBT), a silicon-based dielectrically transduced nanoelectromechanical (NEM) resonator embedding a sense transistor directly into the resonator body. Combining the benefits of FET sensing with the frequency scaling capabilities and high quality factors (Q) of internal dielectrically transduced bar resonators, the resonant body transistor achieves >10 GHz frequencies and can be integrated into a standard CMOS process for on-chip clock generation… CONTINUE READING
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