The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter

@article{Bircumshaw2003TheRB,
  title={The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter},
  author={Brian L. Bircumshaw and Guangyin Liu and Hiroaki Takeuchi and Tsu-Jae King and Robert T. Howe and O. M. O'Reilly and Albert P. Pisano},
  journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)},
  year={2003},
  volume={1},
  pages={875-878 vol.1}
}
This paper presents a new electrostatic RF MEMS resonator design: the radial bulk annular resonator (RBAR). The RBAR utilizes the bulk radial resonant modes of an annulus. The theory behind the RBAR, and its predecessor the bulk longitudinal resonator (BLR), will be developed and discussed. It is found that the RBAR is capable of achieving an arbitrarily low motional resistance for any desired resonant frequency at the cost of increased average annular radius. This feature makes the RBAR… CONTINUE READING

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