The properties of metal doped TiOx thin films deposited by PVD method

@inproceedings{Horkov2009ThePO,
  title={The properties of metal doped TiOx thin films deposited by PVD method},
  author={Marta Hor{\'a}kov{\'a} and Nicolas Martin and Eric Aubry and Petr Spatenka},
  year={2009}
}