The low energy ion assisted control of interfacial structure: Ion incident energy effects

@article{Zhou2000TheLE,
  title={The low energy ion assisted control of interfacial structure: Ion incident energy effects},
  author={X. Zhou and H. Wadley},
  journal={Journal of Applied Physics},
  year={2000},
  volume={87},
  pages={8487-8496}
}
The properties of multilayered materials are often dependent upon their interfacial structure. For low temperature deposition processes where the structure is kinetically controlled, the interfacial roughness and the extent of interlayer mixing are primarily controlled by the adatom energy used in the deposition. Inert gas ion assistance during the growth process also enables manipulation of the interfacial roughness and intermixing. To explore inert gas ion assistance, a molecular dynamics… Expand
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