The limits of edge bead planarization and surface levelling in spin-coated liquid films

  title={The limits of edge bead planarization and surface levelling in spin-coated liquid films},
  author={Steve Arscott},
  journal={Journal of Micromechanics and Microengineering},
  • S. Arscott
  • Published 8 January 2020
  • Physics
  • Journal of Micromechanics and Microengineering
A model is presented here to predict fluid reflow in a viscous liquid film having time-dependent physical properties. The model is applied to the practical example of the reflow planarization (surface levelling) of ‘edge bead’ features resulting from the spin coating process. During the reflow planarization of edge beads, the physical properties (surface tension, density and viscosity) of the spin-coated liquid can change over time for several reasons e.g. temperature change, solvent loss, and… 
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