The intelligent motion surface: a hardware/software tool for the assembly of meso-scale devices

@inproceedings{Coutinho1997TheIM,
  title={The intelligent motion surface: a hardware/software tool for the assembly of meso-scale devices},
  author={Murilo G. Coutinho and Peter M. Will and P. Selvan Viswanathan},
  booktitle={ICRA},
  year={1997}
}
The MicroElectroMechanical Systems (MEMS) field is proceeding at a rapid rate in designing and developing new ever smaller, ever higher performance sensor and actuator devices in silicon. These devices need to be assembled along with more conventional small devices into complete systems. Currently there are no automation systems capable of meeting the… CONTINUE READING