The influence of aluminum incorporation on the structural and electrical properties of ZnO thin films for applications in piezoresistive sensors


Zinc oxide thin films have high resistivity, plus thermal and chemical stability. Such properties make this material suitable for fabrication of piezo-electric sensors and surface acoustic wave devices that are used in Microelectromechanical systems (MEMS). The addition of metallic nanoparticles into the film matrix can reduce the value of resistivity, and… (More)


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