The incorporation of preformed metal nanoparticles in zinc oxide thin films using aerosol assisted chemical vapour deposition

@article{Salan2010TheIO,
  title={The incorporation of preformed metal nanoparticles in zinc oxide thin films using aerosol assisted chemical vapour deposition},
  author={A. Sala{\"u}n and J. Hamilton and D. Iacopino and S. Newcomb and M. G. Nolan and S. Padmanabhan and I. Povey and M. Sala{\"u}n and M. Pemble},
  journal={Thin Solid Films},
  year={2010},
  volume={518},
  pages={6921-6926}
}
Abstract The feasibility of Aerosol Assisted Chemical Vapour Deposition (AA-CVD) has been investigated for the growth of zinc oxide (ZnO) films containing preformed metal nanoparticles. The deposition parameters were first established for ZnO thin films, by varying the heating configuration, substrate temperature and deposition time. Films were characterised using Scanning Electron Microscopy and X-Ray Diffraction. As-deposited films, grown at 250 °C, were mostly amorphous and transformed to… Expand
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