The formation of moulds for 3 D microstructures using excimer laser ablation

Fabrication by the ‘Laser-LIGA’ process of three-dimensional structures for micro-fluidic devices is investigated. Polymer moulds are formed by projection ablation using an excimer laser operating at 248 nm wavelength. The moulds are replicated by electroforming — as in conventional X-ray LIGA — to produce fixed and freely moving nickel microturbine parts… (More)