The formation of Er-oxide nanoclusters in SiO2 thin films with excess Si

  title={The formation of Er-oxide nanoclusters in SiO2 thin films with excess Si},
  author={Annett Th{\o}gersen and Jeyanthinath Mayandi and Terje G. Finstad and A. Olsen and Spyros Diplas and Masanori Mitome and Yoshio Bando},
  journal={Journal of Applied Physics},
The nucleation, distribution, and composition of erbium embedded in a SiO2–Si layer were studied with high resolution transmission electron microscopy (TEM), electron energy loss spectroscopy, energy filtered TEM, scanning transmission electron microscopy, and x-ray photoelectron spectroscopy. When SiO2 layer contains small amounts of Si and Er, nanoclusters of Er oxide are formed throughout the whole layer. The exposure of oxide to an electron beam with 1.56×106 electrons nm2 s causes… 

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