The failure mechanisms of micro-scale cantilevers in shock and vibration stimuli

@article{Sheehy2008TheFM,
  title={The failure mechanisms of micro-scale cantilevers in shock and vibration stimuli},
  author={Michael Sheehy and Michael Reid and J. Punch and Sumit Goyal and Gr{\'a}inne Kelly},
  journal={2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS},
  year={2008},
  pages={2-7}
}
Contemporary shock testing of micro-devices is carried out in controlled test environments where test parameters can be monitored with current metrology techniques. Due to demanding environments and limited scope of design rules, the reliability of micro devices has become a concern. A modified Hopkinson pressure bar (HPB) is used to investigate failure mechanisms of single crystal silicon (SCS) micro-cantilever devices under high-g accelerations. Response upon impact is monitored using high… CONTINUE READING