The fabrication and preservation of nanostructures on silicon wafers with a native oxide layer.

Abstract

This study used nano-oxidation lithography to create oxidized circular nanostructures on a silicon wafer with a native oxide layer (NOL). We also investigated the impact of wet etching on the size of circular oxidized nanostructures and examined how the method and duration of preservation affect them. Experimental results show that the height and width of… (More)
DOI: 10.1002/sca.21007

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