The electromechanical response of a self-excited MEMS Franklin oscillator

  title={The electromechanical response of a self-excited MEMS Franklin oscillator},
  author={S. A. Shmulevich and Inbar Hotzen and David Elata},
  journal={2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)},
We present a self-excited MEMS Franklin oscillator, which responds in steady state vibrations when subjected to a sufficient dc voltage. The system is constructed from an electrostatically-floating rotor, which sequentially transfers charge between a source and drain electrodes. We present a comprehensive analysis of the electromechanical response of the system. Our analysis shows that current flows from the source to drain only when the rotor is in transition. Surprisingly, at contact of the… 

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