The effect of trench-gate-oxide structure on EPROM device operation

A floating-gate erasable programmable read-only memory (EPROM) cell with a thin trench-gate-oxide (TGO) structure near the drain region was fabricated using electron-beam lithography technology. Several promising advantages were found for the TGO cell. The writing time was measured to be 100 faster than conventional devices of the same dimensions. Two… (More)