The design of nano-film tunneling-effect micro gyroscope

The micro gyroscope based on the nano-film tunneling effect is designed and the mesoscopic piezoresistive effect theory of resonant tunneling film structure (RTS) is also researched in this paper. In the mean time, the structure and its material of the RTS are designed and manufactured. The RTS which can explain the resonant tunneling effect reduces the… CONTINUE READING