The depth resolution of sputter profiling

@article{Andersen1979TheDR,
  title={The depth resolution of sputter profiling},
  author={H. H. Andersen},
  journal={Applied physics},
  year={1979},
  volume={18},
  pages={131-140}
}
  • H. H. Andersen
  • Published 1979
  • Materials Science
  • Applied physics
  • It is shown that the bulk radiation damage accompanying sputtering events sets ultimate limits to the depth resolution attainable in sputter profiling. These limits have been reached in a few cases but most published experimental resolutions are dominated either by instrumental effects or deterioration of depth resolution caused by surface-topography changes. The radiation-damage induced mixing is called “cascade mixing”. Guidelines for selection of projectile species and energies to minimize… CONTINUE READING
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