The aligned Si nanowires growth using MW plasma enhanced CVD

@article{Dzbanovsky2005TheAS,
  title={The aligned Si nanowires growth using MW plasma enhanced CVD},
  author={N. N. Dzbanovsky and V. V. Dvorkin and V. G. Pirogov and N. V. Suetin},
  journal={Microelectronics Journal},
  year={2005},
  volume={36},
  pages={634-638}
}