The active microbolometer: a new concept in infrared detection

  title={The active microbolometer: a new concept in infrared detection},
  author={K. Liddiard},
  booktitle={SPIE Micro + Nano Materials, Devices, and Applications},
  • K. Liddiard
  • Published in
    SPIE Micro + Nano Materials…
  • Engineering
During the past decade there has been a major change, often described as a paradigm shift, in passive infrared (IR) detection, due to the rapid development of microbolometer IR detectors fabricated by MEMS/MST technology. Microbolometers are now replacing the elegant but costly cryogenically cooled photon detector technology for all but specialised or very high performance applications. Silicon resistance microbolometers were first developed at the Defence Science and Technology Organisation… Expand
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