The Structure of Self-Assembled Monolayers of Alkylsiloxanes on Silicon: A Comparison of Results from Ellipsometry and Low-Angle X-ray Reflectivity

Abstract

The thicknesses of Cl0-Cl8 alkylsi loxane monolayers on si l icon-si l icon dioxide substrates have been measured with el l ipsometry and low-angle X-ray ref lect ion. Although, for any given sample, thicknesses measured by the two methods agree to within experimental error, ellipsometric measurements are systematically larger bv approximately' 2 A. ttris… (More)

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