The Role of Electron Impact Ionization Cross Sections in Low-Temperature Plasmas

@inproceedings{Becker1998TheRO,
  title={The Role of Electron Impact Ionization Cross Sections in Low-Temperature Plasmas},
  author={Katrin Becker and Vladimir Tarnovsky and Herb Deutsch and Tilmann D. M{\"a}rk},
  year={1998}
}
The use of non-equilibrium, low-temperature plasmas for materials processing is the key to the advancement of many rapidly developing technologies. The selective and highly anisotropic etching of materials and the controlled deposition of thin films in the fabrication of microelectronic structures is one important area of plasma-assisted material processing… CONTINUE READING