The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process

@inproceedings{Wu2001TheMA,
  title={The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process},
  author={Chien-Hung Wu and Juyong Chung and Moon Hi Hong and Christian A. Zorman and Pirouz Pirouz and Mehran Mehregany},
  year={2001}
}