The MIT Nanoruler : A Tool for Patterning Nano-Accurate Gratings

Abstract

Historically, the ability to observe and measure the results of processes has been critical to advancing fabrication technology. Thus, improvements in optical microscopy (e.g., Nomarski differential interference contrast) were a key enabler of the microelectronics revolution. In turn, the scanning-electron and atomic-force microscopes are essential tools as… (More)

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