The Characterization and Optimization of the Thermal Oxidation Process Equipment Using Experimental Design and Data Transformation

@article{Hailong2006TheCA,
  title={The Characterization and Optimization of the Thermal Oxidation Process Equipment Using Experimental Design and Data Transformation},
  author={You Hailong and Jia Xinzhang and Wang Shaoxi},
  journal={2006 25th International Conference on Microelectronics},
  year={2006},
  pages={359-362}
}
Using design of experiment and data transformation, the model of thermal oxidation furnace is developed. The model involves six input factors and two responses. Only 16 run experiments are needed through the fractional factorial experimental design. The Box-Cox transformation method is used to transform the experimental data, and the optimum transformation… CONTINUE READING