The CMOS-MEMS 3-axis capacitive accelerometer to meet the commercial specifications

Abstract

This study presents the world first post-CMOS 3-axis accelerometer to meet the commercial specifications using the 0.18μm standard CMOS process and one-step vapor HF post CMOS process. The novel pure-metal hollow springs and high stiffness proof-mass successfully resist the thermal deformation issues. Moreover, the special arrangement of out-of-plane spring… (More)

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