The AFM tweezers: integration of a tweezers function with an AFM probe

@article{Takekawa2005TheAT,
  title={The AFM tweezers: integration of a tweezers function with an AFM probe},
  author={Tetsuya Takekawa and Kenji Nakagawa and Gen Hashiguchi},
  journal={The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.},
  year={2005},
  volume={1},
  pages={621-624 Vol. 1}
}
A prototype of AFM (atomic force microscope) tweezers is presented. In order to combine the function of nano objects manipulation with AFM observation, we have developed a tweezers-type AFM probe device using micromachining technology. The device has two thin wedge-type arms shaped by anisotropic etching and local oxidation of silicon techniques; one arm… CONTINUE READING