The $\hbox{Pd/TiO}_{2}$/ $\hbox{n}$-LTPS Thin-Film Schottky Diode on Glass Substrate for Hydrogen Sensing Applications

  title={The \$\hbox\{Pd/TiO\}_\{2\}\$/ \$\hbox\{n\}\$-LTPS Thin-Film Schottky Diode on Glass Substrate for Hydrogen Sensing Applications},
  author={Tse-Heng Chou and Yean-Kuen Fang and Yen-Ting Chiang and Kung-Cheng Lin and Cheng-I Lin and Chyuan-Haur Kao and Hsiao-yi Lin},
  journal={IEEE Electron Device Letters},
A Pd/TiO2/n-type low-temperature-polysilicon (n-LTPS) MOS thin-film Schottky diode fabricated on a glass substrate for hydrogen sensing is reported. The n-LTPS is an excimer-laser-annealed and PH3 -gas-plasma-treated amorphous-silicon (a-Si) thin film. At room temperature and -2-V bias, the developed MOS Schottky diode exhibited a high signal ratio of 1540 to 50 ppm of hydrogen gas, with a fast response time of 40 s, respectively. The signal ratio is better or comparable with that of other… CONTINUE READING
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