Texture of silicide films on Si(001): the occurrence of axiotaxy in cubic CoSi/sub 2/, tetragonal /spl alpha/-FeSi/sub 2/ and orthorhombic NiSi

@article{Detavernier2004TextureOS,
  title={Texture of silicide films on Si(001): the occurrence of axiotaxy in cubic CoSi/sub 2/, tetragonal /spl alpha/-FeSi/sub 2/ and orthorhombic NiSi},
  author={Christophe Detavernier and C. Lavoic},
  journal={Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.},
  year={2004},
  volume={1},
  pages={445-450 vol.1}
}
It was found that cubic CoSi/sub 2/, tetragonal /spl alpha/-FeSi/sub 2/ and orthorhombic NiSi films formed by the solid state reaction of metal films and single crystal Si(100) substrates are textured. The polycrystalline films consist of grains in which certain crystallographic planes align preferentially with [110]-type planes of Si, leading to an oil… CONTINUE READING