Test structures for nano-gap fabrication process development for nano-electromechanical systems

Abstract

Nanometre scale pores, gaps or trenches are of significant interest for a number of applications in nano and microsystems, including biosensors, nanofluidic devices and mechanical resonators. This paper presents the design of two test structure chips for the development of a process capable of the fabrication of controllable nanoscale trenches or gaps. This… (More)

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