Terahertz Photoacoustic Spectroscopy Using an MEMS Cantilever Sensor

  title={Terahertz Photoacoustic Spectroscopy Using an MEMS Cantilever Sensor},
  author={Nathan E. Glauvitz and Ronald A. Coutu and Ivan R. Medvedev and Douglas T. Petkie},
  journal={Journal of Microelectromechanical Systems},
In this paper, a microelectromechanical systems cantilever sensor was designed, modeled, and fabricated to measure the photoacoustic (PA) response of gases under very low vacuum conditions. The micromachined devices were fabricated using silicon-on-insulator wafers and then tested in a custom-built, miniature, vacuum chamber during this first-ever demonstration. Terahertz radiation was amplitude modulated to excite the gas under test and perform PA molecular spectroscopy. Experimental data show… CONTINUE READING
1 Extracted Citations
21 Extracted References
Similar Papers

Referenced Papers

Publications referenced by this paper.
Showing 1-10 of 21 references

MEMS cantilever sensor for photoacoustic detection of terahertz radiation

  • N. E. Glauvitz, R. A. Coutu, Jr., M. Kistler, I. R. Medvedev, D. T. Petkie
  • Proc. SEM Annu. Conf. Exposit. Experim. Appl…
  • 2013
2 Excerpts

Sensitivity-improved silicon cantilever microphone for acousto-optical detection

  • P. Sievilä, N. Chekurov, J. Raittila, I. Tittonen
  • Sens. Actuators A, Phys., vol. 190, no. 1, pp. 90…
  • 2013

Terahertz quartz enhanced photo-acoustic sensor

  • S. Borri
  • Appl. Phys. Lett., vol. 103, no. 2, p. 021105…
  • 2013

Simultaneous detection of trace gases using multiplexed tunable diode lasers and a photoacoustic cell containing a cantilever microphone

  • E. D. McNaghten, K. A. Grant, A. M. Parkes, P. A. Martin
  • Appl. Phys. B, Lasers Opt., vol. 107, no. 3, pp…
  • 2012

Dual cantilever enhanced photoacoustic detector with pulsed broadband IR-source

  • J. Fonsen, V. Koskinen, K. Roth, J. Kauppinen
  • Vibrat. Spectrosc., vol. 50, no. 2, pp. 214–217…
  • 2009

Photoacoustic detection of gases using microcantilevers

  • B. D. Adamson, J. E. Sader, E. J. Bieske
  • J. Appl. Phys., vol. 106, no. 11, p. 114510, 2009…
  • 2009

Photoacoustic gas detection using a cantilever microphone and III–V mid-IR LEDs

  • T. Kuusela, J. Peura, B. A. Matveev, M. A. Remennyy, N. M. Stus’
  • Vibrat. Spectrosc., vol. 51, no. 2, pp. 289–293…
  • 2009

Progress in cantilever enhanced photoacoustic spectroscopy

  • V. Koskinen, J. Fonsen, K. Roth, J. Kauppinen
  • Vibrat. Spectrosc., vol. 48, no. 1, pp. 16–21…
  • 2008
3 Excerpts

Similar Papers

Loading similar papers…