Terahertz Micromachined On-Wafer Probes: Repeatability and Reliability

  title={Terahertz Micromachined On-Wafer Probes: Repeatability and Reliability},
  author={Lihan Chen and Chunhu Zhang and Theodore J. Reck and Alexander I. Arsenovic and Matthew F. Bauwens and Christopher Emil Groppi and A. W. Lichtenberger and R. M. Weikle and N. Scott Barker},
  journal={IEEE Transactions on Microwave Theory and Techniques},
An improved micromachined on-wafer probe covering frequencies 500-750 GHz is demonstrated in this paper to address sub-millimeter-wave integrated-circuit testing. Measurements of a prototype WR-1.5 micromachined on-wafer probe exhibit a return loss better than 12 dB and a mean insertion loss of 6.5 dB from 500 to 750 GHz. The repeatability of on-wafer measurements with the micromachined probe is investigated. Monte Carlo simulations are used to identify the dominant error source of on-wafer… CONTINUE READING
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