Tensile strained $In_{x}Ga_{1-x}P$ membranes for cavity optomechanics

  title={Tensile strained \$In\_\{x\}Ga\_\{1-x\}P\$ membranes for cavity optomechanics},
  author={Garrett D. Cole and Pen-Li Yu and Claus Gartner and Karoline Siquans and Ramon Moghadas Nia and Jonas Schmole and Jason Hoelscher-Obermaier and Thomas P. Purdy and Witlef Wieczorek and Cindy A. Regal and Markus Aspelmeyer},
  journal={arXiv: Mesoscale and Nanoscale Physics},
We investigate the optomechanical properties of tensile-strained ternary InGaP nanomembranes grown on GaAs. This material system combines the benefits of highly strained membranes based on stoichiometric silicon nitride, with the unique properties of thin-film semiconductor single crystals, as previously demonstrated with suspended GaAs. Here we employ lattice mismatch in epitaxial growth to impart an intrinsic tensile strain to a monocrystalline thin film (approximately 30 nm thick). These… 

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