Templating and Replication of Spiral Photonic Crystals for Silicon Photonics

Abstract

This paper describes femtosecond laser lithography of 3-D photonic crystal templates in commercial photoresist SU-8 and replication of these templates with silicon. Using this approach, silicon-based photonic crystals having 3-D square spiral architecture and exhibiting photonic stop gaps near the 2.5-μm wavelength were fabricated. Possibilities to use a multiple-beam interference technique for two-photon absorption templating of photonic crystals are explored.

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Cite this paper

@inproceedings{Seet2008TemplatingAR, title={Templating and Replication of Spiral Photonic Crystals for Silicon Photonics}, author={Kock Khuen Seet and Vygantas Mizeikis and Kenta Kannari and Saulius Juodkazis and Hiroaki Misawa and Nicolas T{\'e}treault and Sajeev John}, year={2008} }