Temperature-compensated aluminum nitride lamb wave resonators

@article{Lin2010TemperaturecompensatedAN,
  title={Temperature-compensated aluminum nitride lamb wave resonators},
  author={C. Lin and Ting-ta Yen and Y. Lai and V. Felmetsger and M. Hopcroft and J. H. Kuypers and A. P. Pisano},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2010},
  volume={57}
}
  • C. Lin, Ting-ta Yen, +4 authors A.P. Pisano
  • Published 2010
  • Materials Science, Medicine
  • IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
  • In this paper, the temperature compensation of AlN Lamb wave resonators using edge-type reflectors is theoretically studied and experimentally demonstrated. By adding a compensating layer of SiO2 with an appropriate thickness, a Lamb wave resonator based on a stack of AlN and SiO2 layers can achieve a zero first-order temperature coefficient of frequency (TCF). Using a composite membrane consisting of 1 ¿m AlN and 0.83 ¿m SiO2, a Lamb wave resonator operating at 711 MHz exhibits a first-order… CONTINUE READING
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