Temperature and pressure characterization of the quality factor in a CMOS-MEMS resonator

@article{Banerji2016TemperatureAP,
  title={Temperature and pressure characterization of the quality factor in a CMOS-MEMS resonator},
  author={Saoni Banerji and Jordi Madrenas and Daniel Fernx00E1ndez},
  journal={2016 IEEE SENSORS},
  year={2016},
  pages={1-3}
}
In this paper, we present a study of the quality factor (Q) behavior of a CMOS-MEMS resonator under different conditions of temperature and pressure. The device has been manufactured using standard 250 nm CMOS technology followed by an in-house BEOL metal-layer release wet etching. The manufactured sensor is used as a pressure estimator based on the variation of Q. Experiments have demonstrated an inverse relationship between the resonator Q and temperature in different pressure regimes. The… CONTINUE READING