Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer

@article{Hopcroft2006TemperatureCO,
  title={Temperature Compensation of a MEMS Resonator Using Quality Factor as a Thermometer},
  author={M. Hopcroft and Manjari Agarwal and K. K. Park and Byungkyu Kim and C. Jha and R. N. Candler and Gary Yama and Boris Murmann and T. W. Kenny},
  journal={19th IEEE International Conference on Micro Electro Mechanical Systems},
  year={2006},
  pages={222-225}
}
Silicon MEMS resonators have great potential for on-chip high frequency signal applications. This paper compares methods of sensing the temperature of an encapsulated silicon MEMS resonator and using this temperature measurement to stabilize the temperature, and hence the resonant frequency, of the resonator. The use of external Pt RTDs, integrated Si thermistors, and the use the Quality factor (Q) of the resonator are explored. Use of the Q as a temperature sensor is explored in detail as it… CONTINUE READING
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