Teaching SIMS fundamentals using the FIB ion microscope

  title={Teaching SIMS fundamentals using the FIB ion microscope},
  author={Richard J. Chater and David S. McPhail},
Abstract The use of liquid metal source ion beams for microscopy and ion milling applications has increased dramatically in recent years. This paper explores the teaching of ion–solid sputtering and ionization phenomena without the facility to mass analyse the ionised yield available in dedicated SIMS instrumentation. Fundamental parameters can be demonstrated during the limited period of an undergraduate laboratory teaching session.