Tapping-mode HF nanometric lateral gap resonators: experimental and theory


We report in this paper on the use of micromechanical resonators in tapping-mode for HF frequencies. Resonators involved are clamped-clamped beams with nanometer-scale lateral gap for symmetric capacitive transducers. Under tapping-mode actuation, square shape transmission curves are obtained with several tenth of kHz bandwidth and natural resonance… (More)

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@article{Quevy2003TappingmodeHN, title={Tapping-mode HF nanometric lateral gap resonators: experimental and theory}, author={Emmanuel Quevy and Bernard Legrand and Dominique Collard and Lionel Buchaillot}, journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)}, year={2003}, volume={1}, pages={879-882 vol.1} }