• Corpus ID: 55032420

THz Antenna-Coupled Microbolometer with 0.1-μm-wide Titanium Thermistor

@article{Tiwari2015THzAM,
  title={THz Antenna-Coupled Microbolometer with 0.1-$\mu$m-wide Titanium Thermistor},
  author={Ajay Tiwari and Hiroaki Satoh and Makoto Aoki and Masanori Takeda and Norihisa Hiromoto and Hiroshi Inokawa},
  journal={International Journal of ChemTech Research},
  year={2015},
  volume={7},
  pages={1019-1026}
}
Antenna-coupled microbolometers to detect terahertz wave were fabricated and their characteristics were evaluated at room temperature. The microbolometer consists of an integrated heater-thermistor and half-wave dipole antenna designed for 1 THz. The width of the Ti thermistor is made as narrow as 0.1 μm by electron beam lithography, and meander shape with longer effective length of thermistor is adopted to realize higher electrical resistance and to improve responsivity. The electrical… 

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