• Corpus ID: 55032420

THz Antenna-Coupled Microbolometer with 0.1-μm-wide Titanium Thermistor

@article{Tiwari2015THzAM,
  title={THz Antenna-Coupled Microbolometer with 0.1-$\mu$m-wide Titanium Thermistor},
  author={Ajay Tiwari and Hiroaki Satoh and Makoto Aoki and Masanori Takeda and Norihisa Hiromoto and Hiroshi Inokawa},
  journal={International Journal of ChemTech Research},
  year={2015},
  volume={7},
  pages={1019-1026}
}
Antenna-coupled microbolometers to detect terahertz wave were fabricated and their characteristics were evaluated at room temperature. The microbolometer consists of an integrated heater-thermistor and half-wave dipole antenna designed for 1 THz. The width of the Ti thermistor is made as narrow as 0.1 μm by electron beam lithography, and meander shape with longer effective length of thermistor is adopted to realize higher electrical resistance and to improve responsivity. The electrical… 

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References

SHOWING 1-10 OF 20 REFERENCES

Room-temperature THz antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna

We have proposed and fabricated an antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna on a Si substrate to achieve a high-performance sensing in 1 THz

Electromagnetic Simulation for THz Antenna-Coupled Microbolometers Operated at Room Temperature

Room-temperature terahertz (THz) detectors with higher performance are necessary for utilizing the THz wave in various sensing, spectroscopy and imaging, but even the best ones in the present are

Analysis of Microbolometer Characteristics for Antenna-Coupled Terahertz Detectors

Assuming the use in antenna-coupled bolometers to detect terahertz wave, an integrated heater and thermistor was fabricated with titanium on a silicon substrate and its responsivity was investigated

Antenna-coupled microbolometers

This paper analyzes the development trends of devices and processes for fabricating antenna-coupled microbolometers for the IR, submillimeter, and millimeter ranges. Depending on the problem to be

Terahertz detectors and focal plane arrays

Terahertz (THz) technology is one of emerging technologies that will change our life. A lot of attractive applications in security, medicine, biology, astronomy, and non-destructive materials testing

Fabrication and performance of microbolometer arrays based on nanostructured vanadium oxide thin films

In this paper, 32 × 32 infrared (IR) uncooled focal plane arrays (UFPAs) based on nanostructured vanadium oxide (VOx) thermally sensitive material are fabricated by micromachining processes. The

Thermal Characterization of the 144 nm GMR Layer Using Microfabricated Suspended Structures

The performance and reliability of GMR heads are influenced by the level of temperature rise, which may occur in the device during the normal operation or during an electrostatic discharge (ESD)

Infrared focal plane array incorporating silicon IC process compatible bolometer

A 128/spl times/128 element bolometer infrared image sensor using thin film titanium is proposed. The device is a monolithically integrated structure with a titanium bolometer detector located over a

Thermal Conductivity and Interfacial Thermal Resistance: Measurements of Thermally Oxidized SiO2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique

This article describes the development of a method to measure the normal-to-plane thermal conductivity of a very thin electrically insulating film on a substrate. In this method, a metal film, which

Length Dependence of Microbolometer Characterisitcs

References 1) A. Rogalski and F. Sizov, Opt. Ele. Rev. 19, 346 (2011). 2) A. Tiwari, H. Satoh, M. Aoki, M. Takeda, N. Hiromoto and H. Inokawa, International Microprocesses and Nanotechnology