• Corpus ID: 55032420

THz Antenna-Coupled Microbolometer with 0.1-μm-wide Titanium Thermistor

  title={THz Antenna-Coupled Microbolometer with 0.1-$\mu$m-wide Titanium Thermistor},
  author={Ajay Tiwari and Hiroaki Satoh and Makoto Aoki and Masanori Takeda and Norihisa Hiromoto and Hiroshi Inokawa},
  journal={International Journal of ChemTech Research},
Antenna-coupled microbolometers to detect terahertz wave were fabricated and their characteristics were evaluated at room temperature. The microbolometer consists of an integrated heater-thermistor and half-wave dipole antenna designed for 1 THz. The width of the Ti thermistor is made as narrow as 0.1 μm by electron beam lithography, and meander shape with longer effective length of thermistor is adopted to realize higher electrical resistance and to improve responsivity. The electrical… 

Figures and Tables from this paper

Room-Temperature Terahertz Antenna-Coupled Microbolometers with Titanium Thermistor and Heater

  • N. HiromotoA. Banerjee H. Inokawa
  • Materials Science
    2019 16th International Conference on Quality in Research (QIR): International Symposium on Electrical and Computer Engineering
  • 2019
High-detectivity room-temperature terahertz (THz) detectors are expected to be utilized in spectroscopy and imaging for such applications as inspection for safety, nondestructive sensing in industry

Responsivity and NEP Improvement of Terahertz Microbolometer by High-Impedance Antenna

The antenna-coupled microbolometer with suspended titanium heater and thermistor was attractive as a terahertz (THz) detector due to its structural simplicity and low noise levels. In this study, we

Performance improvement of on-chip integrable terahertz microbolometer arrays using nanoscale meander titanium thermistor

In this study, uncooled antenna-coupled microbolometer arrays were fabricated to detect terahertz waves by using nanoscale meander-shaped Ti thermistors with design widths of DW = 0.1 and 0.2 μm,

Investigation of silicon-on-insulator CMOS integrated thermocouple and heater for antenna-coupled bolometer

This paper presents the characterization of 0.6 μm silicon-on-insulator CMOS processed integrated thermocouple-heater device for bolometer applications. Two different kinds of thermocouple with poly-

Performance Comparison of SOI-Based Temperature Sensors for Room-Temperature Terahertz Antenna-Coupled Bolometers: MOSFET, PN Junction Diode and Resistor

The present result suggests that the n-channel MOSFET can be a promising detector for THz applications.

Highly sensitive and functional photodetectors based on silicon-on-insulator

Silicon-on-insulator (SOI) offers distinctive features to photodetectors based on optical confinement, carrier confinement and thermal isolation, resulting in enhanced light absorption, sensitive

Impact of Downscaling on Terahertz Antenna-Coupled Bolometers

Scaling trend in the integrated heater and thermistor for terahertz antenna-couple bolometers is analyzed in terms of responsivity and thermal response speed, i.e. cutoff frequency. Two cases where



Room-temperature THz antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna

We have proposed and fabricated an antenna-coupled microbolometer with a Joule-heating resistor at the center of a half-wave antenna on a Si substrate to achieve a high-performance sensing in 1 THz

Electromagnetic Simulation for THz Antenna-Coupled Microbolometers Operated at Room Temperature

Room-temperature terahertz (THz) detectors with higher performance are necessary for utilizing the THz wave in various sensing, spectroscopy and imaging, but even the best ones in the present are

Analysis of Microbolometer Characteristics for Antenna-Coupled Terahertz Detectors

Assuming the use in antenna-coupled bolometers to detect terahertz wave, an integrated heater and thermistor was fabricated with titanium on a silicon substrate and its responsivity was investigated

Antenna-coupled microbolometers

This paper analyzes the development trends of devices and processes for fabricating antenna-coupled microbolometers for the IR, submillimeter, and millimeter ranges. Depending on the problem to be

Terahertz detectors and focal plane arrays

Terahertz (THz) technology is one of emerging technologies that will change our life. A lot of attractive applications in security, medicine, biology, astronomy, and non-destructive materials testing

Fabrication and performance of microbolometer arrays based on nanostructured vanadium oxide thin films

In this paper, 32 × 32 infrared (IR) uncooled focal plane arrays (UFPAs) based on nanostructured vanadium oxide (VOx) thermally sensitive material are fabricated by micromachining processes. The

Thermal Characterization of the 144 nm GMR Layer Using Microfabricated Suspended Structures

The performance and reliability of GMR heads are influenced by the level of temperature rise, which may occur in the device during the normal operation or during an electrostatic discharge (ESD)

Infrared focal plane array incorporating silicon IC process compatible bolometer

A 128/spl times/128 element bolometer infrared image sensor using thin film titanium is proposed. The device is a monolithically integrated structure with a titanium bolometer detector located over a

Thermal Conductivity and Interfacial Thermal Resistance: Measurements of Thermally Oxidized SiO2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique

This article describes the development of a method to measure the normal-to-plane thermal conductivity of a very thin electrically insulating film on a substrate. In this method, a metal film, which

Length Dependence of Microbolometer Characterisitcs

References 1) A. Rogalski and F. Sizov, Opt. Ele. Rev. 19, 346 (2011). 2) A. Tiwari, H. Satoh, M. Aoki, M. Takeda, N. Hiromoto and H. Inokawa, International Microprocesses and Nanotechnology