TEOS plasma polymerized films: Impact of clustered material in humidity measurement

Abstract

This work aims to humidity and VOCs measurement using TEOS films or TEOS/HFE composites. Films, exposed or not to ultraviolet, were tested on cycles of relative humidity ranging from 25% to 85% and VOCs interference were also evaluated. TEOS films showed good reproducibility up to 85% relative humidity but quick reaction on 90%. The best detection limit was… (More)

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