Systematic study of work function engineering and scavenging effect using NiSi alloy FUSI metal gates with advanced gate stacks

We present a systematic examination of work function modulation and scavenging effect on fully silicided gates using different NiSi alloys (Ti, Hf, Zr, Pd, Pt, and Al) as well as different phases (Ni31Si12 and Nirich-Pt-Si). It is shown that the interface layer between gate FUSI and dielectric is the key to modulate the work function. FUSI alloys were able… CONTINUE READING