Systematic study of packaging designs on the performance of CMOS thermoresistive micro calorimetric flow sensors

@inproceedings{Xu2017SystematicSO,
  title={Systematic study of packaging designs on the performance of CMOS thermoresistive micro calorimetric flow sensors},
  author={Wei Xu and Liang Pan and B. O. Gao and Yi Chiu and Kun Xu and Yi-Kuen Lee},
  year={2017}
}
We systematically study the effect of two packaging configurations for the CMOS thermoresistive micro calorimetric flow (TMCF) sensors: S-type with the sensor chip protrusion-mounted on the flow channel wall and E-type with the sensor chip flush-mounted on the flow channel wall. Although the experimental results indicated that the sensitivity of the S-type was increased by more than 30%; the corresponding flow range as compared to the E-type was dramatically reduced by 60% from 0–11 m s−1 to 0… CONTINUE READING

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