System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation

@article{Wang2007SystemlevelMA,
  title={System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representation},
  author={Yongquan Wang and Hualing Chen and Xueming He},
  journal={Microsystem Technologies},
  year={2007},
  volume={13},
  pages={613-624}
}
A rapid and accurate system-level modeling and simulation for a novel electrostatic-feedback microaccelerometer, based on equivalent networks and electrical analogies, are presented in this paper. With the employment of the structured design strategy, the system is hierarchically decomposed at first, and the macromodel of the elementary transducer (a variable capacitor), is accordingly generated using the nodal analysis method, with the form of matrix or network. Based on this, the two types of… 
2 Citations

Research on Multi-Domain Unified Modeling and Optimization of a Micro Mirror

Referring to the natures of nonlinear dynamics and coupled energy domains presented by Micro-Opto-Electro-Mechanical Systems (MOEMS), a multi energy domain unified simulation language (modelica)

Research on Multi-Domain Unified Modeling and Simulation of a Micro Electro-Thermal Actuator

Referring to the natures of nonlinear dynamics and coupled energy domains presented by Micro-Electro-Mechanical Systems (MEMS), a multi energy domain unified simulation language (modelica) based

References

SHOWING 1-10 OF 23 REFERENCES

Simulation model for micromechanical angular rate sensor

Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems

Lumped-parameter electromechanical transducers are examined theoretically with special regard to their dynamic electromechanical behaviour and equivalent circuits used to represent them. The circuits

Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems

Lumped-parameter electromechanical transducers are examined theoretically with special regard to their dynamic electromechanical behaviour and equivalent circuits used to represent them. The circuits

Review: Automatic Model Reduction for Transient Simulation of MEMS‐based Devices

TLDR
It is shown that in many cases important for practice the order of ODEs can be reduced by several orders of magnitude almost without sacrificing precision.

Reduced-order modeling of weakly nonlinear MEMS devices with Taylor-series expansion and Arnoldi approach

TLDR
Simulation results show that the reduced-order nonlinear models can accurately capture the device dynamic behavior over a much larger range of device deformation than the conventional linearized model.

Emerging simulation approaches for micromachined devices

TLDR
The most commonly used method, that of using physical insight to develop parameterized macromodels, is presented first, and the issues associated with fitting the parameters to simulation data while incorporating design attribute dependencies are considered.

Parameter Preserving Model Reduction for MEMS System-level Simulation and Design

Abstract. Model reduction is a very helpful tool to generate compact models for system-level simulation. Quite often however, system matrices depend on design parameters and the new goal is not only