System-level dynamic simulation for a MEMS clamped-beam based on the mechanical description

@article{Zhang2006SystemlevelDS,
  title={System-level dynamic simulation for a MEMS clamped-beam based on the mechanical description},
  author={Jian Gong Zhang and Weihua Li and Qing-An Huang},
  journal={2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings},
  year={2006},
  pages={602-604}
}
A method for developing the equivalent lumped electrical circuit based on the mechanical description of MEMS structures is proposed, which is used to carry out the system-level simulation of the dynamic behavior of the electromechanically coupled clamped-beam. The main idea of the method is to take the maximum displacement for the common variable, develop the equivalent mechanical description with the help of the mechanical analysis in combination with the energy principle, and implement the… CONTINUE READING

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