System Identification and Contour Tracking of a Plane-Type 3-DOF $(X,Y,\theta z)$ Precision Positioning Table

@article{Fung2010SystemIA,
  title={System Identification and Contour Tracking of a Plane-Type 3-DOF \$(X,Y,\theta z)\$ Precision Positioning Table},
  author={Rong-Fong Fung and Wang-Chi Lin},
  journal={IEEE Transactions on Control Systems Technology},
  year={2010},
  volume={18},
  pages={22-34}
}
In this paper, an adaptive backstepping control (ABC) method for a plane-type 3-DOF (X,Y,θz) precision positioning table is proposed. First, according to the dynamics of a mechanical mass-spring system, we establish mathematical equations that contain linear viscous frictions and varied elasticities with cross-coupling effects due to mechanical bending. In system identification, the real-coded genetic algorithm (RGA) method is employed to find the optimized parameters, and the dynamic responses… CONTINUE READING

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