System Design of Second-Order Sigma-Delta Micromachined Accelerometer

Abstract

Previous researches indicate that a first-order sigma-delta micromachined accelerometer can hardly achieve a high dynamic rang at an acceptable oversampling rate. We have designed a second-order sigma-delta modulator, which includes two integrators and three gains, for micromachined accelerometers. By simulation in Matlab, we have found that the system gain… (More)

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